MKS R750B13TCE2GG Pressure Transducer

R750B13TCE2GG Down? Every Minute of Vacuum Loss Costs You — Get Back Online Fast

Your CVD chamber just tripped. The pressure loop is open. The MKS Baratron® is reading flat zero or pegged full-scale, and your process engineer is already on the phone. You don’t need a datasheet lecture — you need a replacement R750B13TCE2GG on a plane tonight. That’s exactly what we do.

We stock the MKS R750B13TCE2GG (Baratron® 750B series, 1000 Torr absolute, 0–10 VDC output, heated sensor, 15-pin TCE2 connector) in Xiamen, China. DHL Express to Singapore, Seoul, Taipei, or Munich typically clears customs in 48–72 hours. We’ve done it hundreds of times. We’ll do it for you today.

URGENT REQUIREMENT? Contact: [email protected] | WhatsApp: +86 18359268345

Quick Technical Datasheet

Troubleshooting & Replacement Tips

Common failure signatures on the R750B13TCE2GG:

• Output stuck at 0 V: Sensor diaphragm rupture or heater circuit open. Check ±15 V supply at pins first — a dead supply rail mimics a dead sensor. Swap the power cable before condemning the transducer.
• Output pegged at 10 V (1000 Torr) at base pressure: Diaphragm contamination or zero-point drift beyond auto-zero range. If the MKS controller shows ERR or OVER, the sensor is past its calibration window. Replace, don’t recalibrate in the field.
• Noisy / oscillating signal: Ground loop between the sensor shield and the tool chassis. Verify that the D-sub shell is grounded at one end only. Also check for loose CF flange — a micro-leak will cause real pressure oscillation that looks like sensor noise.
• Slow response / sluggish pressure control: Partial blockage of the inlet orifice from process deposits (common in CVD with silane or TEOS). Remove the unit, inspect the orifice under magnification. Do not probe with metal tools — the diaphragm is 25 µm thick.

Replacement procedure — field checklist:

• Vent the chamber to atmosphere or N₂ purge before breaking the CF flange. Never remove a Baratron® under vacuum — the diaphragm will rupture instantly.
• Torque the CF flange bolts to 14–16 N·m in a star pattern using a fresh OFHC copper or aluminum gasket. Reusing the old gasket is the #1 cause of post-replacement leaks.
• After installation, power the sensor and allow 15–20 minutes warm-up for the heater to stabilize before performing a zero-calibration. Zeroing a cold sensor introduces a permanent offset error.
• Perform auto-zero at base pressure (<1 × 10⁻³ Torr) using the MKS controller zero function. If the controller rejects the zero command (zero-range exceeded), the replacement unit may have a factory offset — contact us for a swap.
• Verify 0–10 V output scaling: apply a known pressure reference (e.g., 500 Torr N₂) and confirm the output reads 5.00 ± 0.05 V. Document the result for your maintenance log.
• No DIP switches or address configuration required on the R750B13TCE2GG — it is a pure analog output device. Firmware matching is not applicable.

Reliability in Harsh Conditions

The Baratron® 750B platform was not designed for a clean lab bench. It was designed for the inside of a semiconductor fab — where process gases are corrosive, ambient temperatures swing with tool cycling, and vibration from roughing pumps runs 24/7.

The 316L stainless steel wetted path handles NF₃, Cl₂, HBr, and WF₆ process chemistries without diaphragm attack — the same materials that destroy piezo-resistive sensors within weeks. The all-welded sensor assembly has no O-rings in the vacuum path, eliminating the primary leak point that plagues competing designs.

The 45 °C heated sensor head is the key to long-term zero stability. By keeping the diaphragm above the dew point of virtually all process gases, condensation-induced zero drift — the silent killer of unheated manometers — is eliminated. In production environments running 8,000+ hours per year, this translates directly to fewer unplanned calibration pulls and fewer false pressure alarms.

Vibration immunity is achieved through the capacitance sensing principle itself: unlike strain-gauge or piezo-resistive designs, the capacitance diaphragm is insensitive to mechanical shock along the measurement axis. Units mounted directly on roughing pump manifolds — a configuration that would destroy a piezo sensor in months — routinely run for years without drift.

Each unit we ship has been inspected for CF flange sealing surface condition (no radial scratches, no pitting), D-sub connector pin integrity, and sensor zero verification. Units that fail inspection are not listed. What you order is what ships.

Global Express Logistics

Our warehouse is in Xiamen, Fujian, China — one of China’s primary export hubs with direct DHL and FedEx gateway access. Here’s how a typical urgent order moves:

• Order confirmed before 14:00 CST: Same-day dispatch. DHL Express or FedEx International Priority label generated within 2 hours of payment clearance.
• Export documentation: Commercial invoice, packing list, and HS 9026.20.40 declaration prepared in parallel with packing. No delays at customs declaration stage.
• Transit times (DHL Express, typical):
  • Southeast Asia (SG, MY, TH): 1–2 business days
  • Northeast Asia (KR, JP, TW): 1–2 business days
  • Europe (DE, NL, UK, FR): 3–5 business days
  • North America (US, CA): 3–5 business days
  • Middle East (AE, SA): 2–4 business days
• Packaging: Anti-static bag, foam-lined double-wall carton, CF flange inlet capped. The unit arrives ready to install, not ready to be repacked.
• Tracking: AWB number sent via email within 1 hour of carrier pickup. We monitor shipments and proactively flag customs holds — you won’t be chasing us for updates.
• Import duty support: We provide HS code documentation and can adjust declared value per your country’s de minimis threshold where legally permitted. Ask before ordering.

If your tool is down and you need the unit on-site in 48 hours, tell us your destination airport. We’ll confirm feasibility before you pay — no surprises.

Contact Information

Email: [email protected]
WhatsApp: +86 18359268345
Web: siemensplc.com
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